Incorporation of hydrogen and oxygen into (t)a-C:H thin films deposited using DECR plasma

Materials Research Society Symposium - Proceedings

Volumn 675, Issue , 2001, Pages W10.3.1-W10.3.6

  Piazza, Fabrice ^a   Grambole, Dieter ^b   Herrmann, Folker ^a   Relihan, Gary ^c   Barthe, Marie France ^a   Desgardin, Pierre ^a   Golanski, André ^a  

^a CNRS   (France)

^b INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

^c UNIVERSITY COLLEGE CORK   (Ireland)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 85010711319     PISSN: 02729172     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (13)