Deep lithography with protons: A generic technology for the fabrication of refractive micro-optical modules

2000 IEEE/LEOS International Conference on Optical MEMS

Volumn , Issue , 2000, Pages 103-104

  Volckaerts, B ^a   Ottevaere, H ^a   Vila, A ^a   Muruzabal, M ^a   Debaes, C ^a   Vynck, P ^a   Tuteleers, P ^a   Baukens, V ^a   Hermanne, A ^a   Veretennicoff, I ^a   Thienpont, H ^a  

^a VRIJE UNIVERSITEIT BRUSSEL   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 85010228296     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OMEMS.2000.879647     Document Type: Conference Paper

References (5)

1. S. Sinzinger, J. Jahns, "Microoptics", Wiley-VCH, 1999
2. +-Lithography for 3-D integration of optical circuits", Applied Optics, 29 (26), p. 3723-3724, 1990
3. B. Volckaerts, et al, "Collision phenomena of non-relativistic ions in amorphous materials", 20th Werner Brandt Workshop, Gainesville, Florida, 2000
4. P. Vynck, et al, "Deep proton lithography as rapid prototyping technology : towards improved microoptical components", Proc. Symposium IEEE/LEOS Benelux Chapter, Mons (B), p. 207-210, 1999
5. H. Thienpont, et al, "Plastic Micro-Optical Interconnection Modules for Parallel Free-Space intra MCM Data Communication", Proceedings of the IEEE, Special Issue on 'Short distance Optical Interconnects for Digital Systems, 2000