Investigation of the microstructure of coatings for high power lasers by non-optical techniques

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2253, Issue , 1994, Pages 596-602

  Tench, Robert J ^a   Kozlowski, Mark R ^a   Chow, Robert ^a  

^a LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHEMICAL STABILITY; DEFECTS; DEPOSITION; FAILURE (MECHANICAL); FIBER OPTIC SENSORS; HAFNIUM OXIDES; HIGH POWER LASERS; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; ION BEAMS; LIGHT INTERFERENCE; MECHANICAL STABILITY; MICROSTRUCTURE; MULTILAYERS; OPTICAL COATINGS; SCANNING ELECTRON MICROSCOPY;

CHEMICAL COMPOSITIONS; DEPOSITION PROCESS; ENVIRONMENTAL STABILITY; FAILURE MECHANISM; GROWTH MECHANISMS; MULTI-LAYER-COATING; OPTICAL TECHNIQUE; SCANNING ELECTRONS;

OPTICAL MULTILAYERS;

EID: 85010148710     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.192138     Document Type: Conference Paper

References (8)

1. M. C. Staggs, M. R. Kozlowski, W. J. Siekhaus, and M. Balooch, "Correlation of damage threshold and surface geometry of nodular defects in hr coatings as determined by in-situ atomic force microscopy", Laser-Induced Damage in Optical Materials: 1992, SPIE Vol. 1884, pp. 234-242, 1993.
2. 2 multilayer coatings." Laser Damage in Optical Materials: 1984. NBS Special Pub. 727, p. 356, 1984.
3. M. R. Kozlowski, M. C. Staggs, M. Balooch, R. J. Tench, and W. J. Siekhaus, "The surface morphology of as-deposited and laser-damaged dielectric mirror coatings studied in-situ by atomic force microscopy", Scanning Microscopy Instrumentation: 1991. SPIE Vol. 1556, pp. 68-78, 1992.
4. R. J. Tench, R. Chow, and M. R. Kozlowski, "Characterization of defect geometries in multilayer optical coatings", to be published in JVST in Oct. 1994.
5. K. H. Guenther, "Microstructure of vapor-deposited optical coating", Applied Optics. Vol. 23 No. 21, PP. 3806-3816, 1984, and references within.
6. R. L. Seliger, J. Ward, V. Wang, and R. L. Kubena, "A high-intensity scanning ion probe with submicrometer spot size", Appl. Phvs. Lett. Vol 34, PP 310-312, 1979.
7. AFM produced by Digital Instruments Inc., Santa Barbara, CA.
8. S. A. Letts, D. W. Myers, and L. A. Witt, "Ultrasmooth plasma polymerized coatings for laser fusion targets", J. Vac. Sci Tech.. Vol. 19(3), pp. 739-742, 1981.