Improvement of Production Reproducibility of Tungsten Probe using electropolishing

IEEJ Transactions on Sensors and Micromachines

Volumn 120, Issue 4, 2000, Pages 156-161

  Ken, Takahashi ^a   Masanori, Hayase ^a   Takeshi, Hatsuzawa ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

DC electropolishing; flushing; surface tension control; tapping stylus

Indexed keywords

EID: 85010098128     PISSN: 13418939     EISSN: 13475525     Source Type: Journal    
DOI: 10.1541/ieejsmas.120.156     Document Type: Article

References (4)

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2. G. J. Edwards and P. R. Pearce, “A comparison of AC and DC electrochemical etching Tech.niques for the fabrication of tungsten whiskers”, J. Phys. D :Appl. Phys., 11,pp. 761-764(1978)
3. H. Lemke, “Improved microtips for scanning probe microscopy”, American Institute of Physics, 61, 10, pp. 2538-2541(1990)
4. K. Kjoller and V. B. Elings, ““Fractured Polymer silica fiber surface studied by tapping mode atomic force microscopy”, Surface Science Letters, 290. pp. 688-692(1993)