UV Light Transparency of Emulsion Gray-Scale Mask and 3-D Micro Machining of Photosensitive Glass

IEEJ Transactions on Sensors and Micromachines

Volumn 123, Issue 11, 2003, Pages 499-503

  Mori, Ryotaro ^a   Matsumoto, Yoshinori ^a  

^a KEIO UNIVERSITY   (Japan)

Author keywords

3 D micro machining; deep UV; gray scale mask; photo lithography; photo sensitive glass

Indexed keywords

EID: 85009593603     PISSN: 13418939     EISSN: 13475525     Source Type: Journal    
DOI: 10.1541/ieejsmas.123.499     Document Type: Article

References (4)

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