Hydrocarbon and Fluorocarbon Monitoring by MIS Sensors Using an Ni Catalytic Thermodestructor

IEEE Sensors Journal

Volumn 7, Issue 2, 2007, Pages 192-196

  Vasiliev, Alexey A ^a,c   Terentjev, Alexander A ^a   Yakimov, Sergey S ^a  

^a KURCHATOV INSTITUTE   (Russian Federation)

^b HUMBOLDT UNIVERSITY   (Germany)

^c UNIVERSITAT ROVIRA I VIRGILI   (Spain)

Author keywords

Fluorocarbons; hydrocarbons; metal insulator semiconductor (MIS) and metal electrolyte insulator semiconductor (MEIS) sensors; thermal decomposition

Indexed keywords

EID: 85008035397     PISSN: 1530437X     EISSN: 15581748     Source Type: Journal    
DOI: 10.1109/JSEN.2006.882778     Document Type: Article

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