Characterization of 4-Inch LiTaO3Single Crystals for SAW Device Application

Proceedings - IEEE Ultrasonics Symposium

Volumn 1984-November, Issue , 1984, Pages 243-248

  Yamada, K ^a   Omi, T ^a   Matsumura, S ^a   Nishimura, T ^a  

^a TOSHIBA CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVE VELOCITY; BINARY ALLOYS; LITHIUM ALLOYS; TANTALUM ALLOYS; TECHNETIUM;

EVALUATION RESULTS; FABRICATION PROCESS; GROWTH CONDITIONS; MIRROR SURFACES; SINGLE CRYSTAL WAFERS; THERMAL SHOCK RESISTANCE; UNIFORM DISTRIBUTION; WAFER WARPING;

SINGLE CRYSTALS;

EID: 85008033069     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.1984.198298     Document Type: Conference Paper

References (7)

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4. S. Matsumura; J. Crystal Growth 51(1981)41
5. Y. Yasuhara, N. Yamaji, T. Kurokawa and K. Takahashi; IEEE Trans. CE-28 (1982) 475
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