Submicron structures - Promising filters in EUV: A review

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 1549, Issue , 1991, Pages 385-394

  Gruntman, Michael A ^a  

^a UNIVERSITY OF SOUTHERN CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BANDPASS FILTERS; PLATE METAL; SPACE APPLICATIONS; X RAYS;

CHANNEL DIAMETERS; EUV RADIATION; MICROCHANNEL PLATE TECHNOLOGY; NUCLEAR TRACK FILTER; PARALLEL CHANNEL; SUBMICRON DIAMETERS; SUBMICRON STRUCTURES;

GAMMA RAYS;

EID: 85002752731     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.48355     Document Type: Conference Paper

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