Fixed abrasive flat lapping with 3M™ 3M™ Trizact™ diamond tile abrasive pads

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 10314, Issue , 2003, Pages 32-35

  Fletcher, T D ^a   Dronen, B ^a   Gobena, F T ^a   Larson, E ^a  

^a 3M COMPANY   (United States)

Author keywords

Abrasive; Coolant; Diamond; Fixed Abrasive; Lapping; Optical Substrates; Silicon; Structured Abrasive

Indexed keywords

ABRASION; ALUMINA; CARBIDE MINERALS; CAST IRON; COOLANTS; DEIONIZED WATER; DIAMONDS; GRINDING (MACHINING); IRON; LAPPING; MINERALS; PELLETIZING; SILICON; SILICON CARBIDE; SILICON WAFERS; SUBSTRATES; SURFACE ROUGHNESS;

AQUEOUS SLURRIES; CONTROLLED THICKNESS; FINISHING TECHNOLOGY; FIXED ABRASIVES; LOOSE ABRASIVE GRINDING; OPTICAL COMPONENTS; OPTICAL SUBSTRATES; POLYMERIC BINDER;

ABRASIVES;

EID: 84999908726     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.2284002     Document Type: Conference Paper

References (1)

1. H. H. Karow, "Fabrication Methods for Precision Optics", pp 144-175, pp 412-413, pp 442-463