Microcontact printing and pattern transfer using trichlorosilanes on oxide substrates

Applied Physics Letters

Volumn 68, Issue 7, 1996, Pages 1022-1024

  St John, Pamela M ^a   Craighead, H G ^a  

^a Department of Materials Science and Engineering   (United States)

Author keywords

ALUMINIUM; ECR HEATING; ETCHING; LITHOGRAPHY; MASKING; PLASMA; SILICON; SURFACE STRUCTURE; TITANIUM

Indexed keywords

EID: 84995713149     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.116216     Document Type: Article

References (6)

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