Microcontact printing and pattern transfer using trichlorosilanes on oxide substrates

Applied Physics Letters

Volumn 68, Issue 7, 1996, Pages 1022-1024

  St John, Pamela M ^a   Craighead, H G ^a  

^a Cornell University   (United States)

Author keywords

ALUMINIUM; ECR HEATING; ETCHING; LITHOGRAPHY; MASKING; PLASMA; SILICON; SURFACE STRUCTURE; TITANIUM

Indexed keywords

EID: 84995713149     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.116216     Document Type: Article

References (6)

1. A. Kumar and, G. M. Whitesides, Appl. Phys. Lett. APPLAB 63, 4 (1993).
2. A. Kumar, H. A. Biebuyck, and G. M. Whitesides, Langmuir 10, 1498 (1994); J. L. Wilbur, A. Kumar, E. Kim, and G. M. Whitesides, Adv. Mater. 6, 600 (1994); E. Kim, A. Kumar, and G. M. Whitesides, J. Electrochem. Soc. 142, 628 (1995).
3. S. R. Wasserman, Y.-T. Tao, and G. M. Whitesides, Langmuir 5, 1074 (1989); K. Seshadri, A. N. Parikh, and D. L. Allara (unpublished).
4. M. J. Lercel, R. C. Tiberio, P. F. Chapman, H. G. Craighead, C. W. Sheen, A. H. Parikh, and, D. L. Allara, J. Vac. Sci. Technol. B JVTBD9 11, 2823 (1993).
5. Y. Xia, M. Mrksich, E. Kim, and G. M. Whitesides (unpublished).
6. M. J. Lercel, H. G. Craighead, and D. L. Allara (unpublished).