Cu/Pilotosensitive-BCB thin-film multilayer technology for high-performance multichip module

Proceedings of the 1994 International Conference on Multichip Modules, MCM 1994

Volumn , Issue , 1994, Pages 115-120

  Shimoto, Tadanori ^a   Matsui, Koji ^a   Utsumi, Kazuaki ^a  

^a NEC CORPORATION   (Japan)

Author keywords

Benzocyclobutene; MCM D; Multicliip module; Photosensitive; RISC module

Indexed keywords

FILM PREPARATION; LIGHT SENSITIVE MATERIALS; MICROPROCESSOR CHIPS; MICROSTRIP LINES; MULTILAYERS; PHOTOSENSITIVITY;

BENZOCYCLOBUTENE; ELECTRICAL PERFORMANCE; ELECTRICAL RESISTANCES; HIGH TEMPERATURE AGING; MULTICLIIP MODULE; PHOTOSENSITIVE; THIN FILM MULTILAYER STRUCTURES; THIN FILM MULTILAYERS;

MULTICHIP MODULES;

EID: 84994411521     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICMCM.1994.753538     Document Type: Conference Paper

References (8)

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