Palladium silicide formation on amorphous silicon by thermal annealing

physica status solidi (a)

Volumn 101, Issue 1, 1987, Pages 151-157

  Yang, Chan‐Syun ^a   Lue, Juh‐Tzeng ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84990666099     PISSN: 00318965     EISSN: 1521396X     Source Type: Journal    
DOI: 10.1002/pssa.2211010117     Document Type: Article

References (14)

1. An Investigation of the Structure of Pd[sub 2]Si Formed on Si