Optimal One-Wafer Cyclic Scheduling and Buffer Space Configuration for Single-Arm Multicluster Tools with Linear Topology

IEEE Transactions on Systems, Man, and Cybernetics: Systems

Volumn 46, Issue 10, 2016, Pages 1456-1467

  Bai, Liping ^a   Wu, Naiqi ^a,b   Li, Zhiwu ^a   Zhou, Mengchu ^c,d  

^a MACAU UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Macao)

^b GUANGDONG UNIVERSITY OF TECHNOLOGY   (China)

^c NEW JERSEY INSTITUTE OF TECHNOLOGY   (United States)

^d KING ABDULAZIZ UNIVERSITY   (Saudi Arabia)

Author keywords

Discrete event system; multicluster tools; Petri net (PN); resource oriented Petri net; scheduling; semiconductor manufacturing

Indexed keywords

DISCRETE EVENT SIMULATION; PETRI NETS; SCHEDULING; SEMICONDUCTOR DEVICE MANUFACTURE; TOPOLOGY;

CYCLIC SCHEDULES; CYCLIC SCHEDULING; DYNAMIC BEHAVIORS; LINEAR TOPOLOGY; MULTI-CLUSTER TOOLS; PETRI NET MODELS; SCHEDULING PROBLEM; SEMICONDUCTOR MANUFACTURING;

SILICON WAFERS;

EID: 84988628751     PISSN: 21682216     EISSN: 21682232     Source Type: Journal    
DOI: 10.1109/TSMC.2015.2501232     Document Type: Article

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