Piezoresistive Scanning Proximity Probes for Nanoscience;Piezoresistive Raster-Kraftsonden für die Nanowissenschaften

Technisches Messen

Volumn 72, Issue 38384, 2005, Pages 103-110

  Rangelow, Iwo W ^a  

^a UNIVERSITY OF KASSEL   (Germany)

Author keywords

micro ; nanomachining; Piezoresistive cantilever; scanning force microscopy

Indexed keywords

EID: 84986543200     PISSN: 01718096     EISSN: None     Source Type: Journal    
DOI: 10.1524/teme.72.2.103.58565     Document Type: Article

References (17)

1. G. Binnig, H. Rohrer, Scanning tunneling microscopy, Helv. Phys. Acta 55 (1982) 726.
2. S.C. Minne, P. Flueckiger, H.T. Soh, C.F. Quate, Independent parallel lithography using the atomic force microscope, J. Vac. Sci. Technol. B 13(3) (May/Jun 1995) 1380.
3. M. Tortonese, H. Yamada, R.C. Barett, C.F. Quate, Atomic resolution with an atomic force microscope using piezoresistive detection, IEEE, 91CH2817-5, 1991, 448.
4. R. Linnemann, T. Gotszalk, L. Hadjiiski, I.W. Rangelow, Application of neural networks to a scanning probe microscopy system, Thin Solid Films 264 (1995) 159.
5. I.W. Rangelow, et al., Fabrication of piezoresistive sensed FM cantilever probe with integrated tip, SPIE 2879 (1996) 56.
6. R. Pedrak, T. Ivanov, T. Gotszalk, P. Hudek, I.W. Rangelow, Micromachined atomic force microscopy sensor with integrated piezoresistive sensor and thermal bimorph actuator for high-speed tapping-mode atomic force microscopy phase-imaging in higher eigenmodes, J. Vac. Sci. Technology B 21(6) (2003) 3102.
7. C.S. Smith, Piezoresistance effect in germanium and silicon, Phys. Rev. 94 (1954) 42.
8. P. Kleimann, B. Semmache, M. Le Berre, D. Barbier, Stress-dependent hole effective masses and piezoresistive properties of p-type monocrystalline and polycrystalline silicon, Phys. Rev. B 57(15) (1998) 8966.
9. T. Ivanov, T. Gotszalk, T. Sulzbach, I.W. Rangelow, Quantum size aspects of the piezoresistive effect in ultra thin piezoresistors, Ultramicroscopy 97 (2003) 377.
10. T. Gotszalk, P. Grabiec, I.W. Rangelow, Ultramicroscopy 82(1-4) (2000) 39.
11. I.W. Rangelow, P. Grabiec, T. Gotszalk, K. Edinger, Piezoresistive SPX Sensors, Surface and Interface Analysis 33 (2002) 59.
12. K. Edinger, T. Gotszalk, I.W. Rangelow, Novel high resolution scanning thermal probe, J. Vac. Sci. Technol. B 19 (2001) 2856.
13. T. Gotszalk, F. Shi, P. Grabiec, P. Dumania, P. Hudek, I.W. Rangelow, Fabrication of multipurpose piezoresistive Wheatstone bridge cantilevers with conductive microtips for electrostatic and scanning capacitance microscopy, J. Vac. Sci. Technol. B 16(6) (1998) 3948.
14. N. Abedinov et al., Chemical recognition based on micromachined silicon cantilever array, J. Vac. Sci. Technol. B 21 (2003) 2931.
15. P. Grabiec et al. Batch fabricated scanning near field optical microscope/atomic force microscopy microprobe integrated with piezoresistive cantilever beam with highly reproducible focused ion beam micromachined aperture, J. Vac. Sci. Technol. B 22 (2004) 16.
16. T. Ivanov et al., Field emission emitter array with a self-aligned volcano-type gate: Fabrication and characterization, J. Vac. Sci. Technol. B 19(6) (2001) 2789.
17. I.W. Rangelow et al., Micromachined ultrasharp silicon and diamond-coated silicon tip as a stable field-emission electron source and a scanning probe microscopy sensor with atomic sharpness, J. Vac. Sci. Technol. B 16 (1998) 3185.