A calibration method of the LFB acoustic microscope system using isotropic standard specimens

Proceedings - IEEE Ultrasonics Symposium

Volumn 1992-October, Issue , 1992, Pages 719-722

  Kushibiki, J ^a   Wakahara, T ^a   Kobayashi, T ^a   Chubachi, N ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC MICROSCOPES; ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; CALIBRATION; SILICA; SUBSTRATES;

ABSOLUTE ACCURACY; CALIBRATION METHOD; LEAKY SURFACE ACOUSTIC WAVES; MEASUREMENTS OF; PROPAGATION CHARACTERISTICS; STANDARD SPECIMENS; SYNTHETIC SILICA GLASS; SYSTEM CALIBRATION;

ACOUSTIC PROPERTIES;

EID: 84985813510     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.1992.275907     Document Type: Conference Paper

References (6)

1. J. Kushibiki and N. Chubachi, "Material characterization by line-focus-beam acoustic microscope", IEEE Trans. Sonics & Ultrason. SU-32, 189-212 (1985).
2. J. Kushibiki, H. Asano, T. Ueda, and N. Chubachi, "Application of line-focus-beam acoustic microscope to inhomogeneity detection on SAW device Materials", 1986 IEEE Ultrasonics Symp. Proc., 749-753 (1986).
3. J. Kushibiki, T. Ueda, and N. Chubachi, "Determination of elastic constants by LEB acoustic microscope", 1987 IEEE Ultrasonics Symp. Proc., 817-821 (1987).
4. J. Kushibiki, T. Ishikawa, and N. Chubachi, "Cut-off characteristics of leaky Sezavva and pseudo-Sezawa wave modes for thin-film characterization", Appl. Phys. Lett. 57, 1967-1969 (1990).
5. J. Kushibiki and N. Chubachi, "Acoustic microscopy for materials characterization", Ultrasonics International 91 Conf. Proc. (Butterworth & Heinemann, Oxford, 1991), pp. 1-13.
6. 3 crystals by line-focus-beam acoustic microscopy", Appl. Phys. Lett. 61, 2164-2166 (1992).