Electrostatic Probe Measurements in the Glow Discharge Plasma of a D. C. Magnetron Sputtering System

Contributions to Plasma Physics

Volumn 28, Issue 2, 1988, Pages 157-167

  Petrov, I ^a   Orlinov, V ^a   Ivanov, I ^a   Kourtev, J ^a  

^a INSTITUTE OF ELECTRONICS   (Bulgaria)

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EID: 84985746709     PISSN: 08631042     EISSN: 15213986     Source Type: Journal    
DOI: 10.1002/ctpp.2150280207     Document Type: Article

References (16)