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Volumn 5, Issue 11, 2011, Pages 649-
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Optical lithography: Azopolymer option
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 84984753785
PISSN: 17494885
EISSN: 17494893
Source Type: Journal
DOI: 10.1038/nphoton.2011.261 Document Type: Article |
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Times cited : (5)
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References (0)
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