Absolute Cross Sections for the Electron‐Impact Dissociation of CF4 and CHF3 into the CFx (x = 1−3) Neutral Radicals

Contributions to Plasma Physics

Volumn 35, Issue 4-5, 1995, Pages 415-420

  Sugai, H ^a   Toyoda, H ^a   Nakano, T ^b   Goto, M ^a  

^a NAGOYA UNIVERSITY   (Japan)

^b SUZUKA NATIONAL COLLEGE OF TECHNOLOGY   (Japan)

Author keywords

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Indexed keywords

EID: 84984363838     PISSN: 08631042     EISSN: 15213986     Source Type: Journal    
DOI: 10.1002/ctpp.2150350409     Document Type: Article

References (15)

1. Dissociative Ionisation and Neutral Dissociation: CF4, a Case Study