Automatic differentiation for gradient-based optimization of radiatively heated microelectronics manufacturing equipment

6th Symposium on Multidisciplinary Analysis and Optimization

Volumn , Issue , 1996, Pages 1167-1175

  Moen, Christopher D ^a   Spence, Paul A ^a   Meza, Juan C ^a   Plantenga, Todd D ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CODES (SYMBOLS); MICROELECTRONIC PROCESSING; MICROELECTRONICS; NUMERICAL METHODS;

AUTOMATIC DIFFERENTIATION TOOL; AUTOMATIC DIFFERENTIATIONS; GRADIENT-BASED OPTIMIZATION; LEAST-SQUARES OPTIMIZATION; MICROELECTRONICS MANUFACTURING; OBJECT-ORIENTED OPTIMIZATION; OPTIMIZATION CALCULATION; OPTIMIZATION PARAMETER;

LEAST SQUARES APPROXIMATIONS;

EID: 84982318906     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.2514/6.1996-4118     Document Type: Conference Paper

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