Fabrication of SnO2-based semiconductor gas sensors for combustible and pollutant gases

Proceedings of the International Conference on Microelectronics, ICM

Volumn 2000-October, Issue , 2000, Pages 317-320

  Khodadadi, A ^a   Mohajerzadeh, S S ^a   Miri, A M ^a   Mortazavi, Y ^a  

^a UNIVERSITY OF TEHRAN   (Iran)

Author keywords

carbon monoxide; cerium oxide; combustible gas; gas sensor; SnO2

Indexed keywords

CARBON MONOXIDE; CERIUM; CHEMICAL SENSORS; GAS DETECTORS; MICROELECTRONICS; OXIDES; SILICON DETECTORS; TEMPERATURE;

CERIUM OXIDES; COMBUSTIBLE GAS; OPERATING TEMPERATURE; POLLUTANT GAS; SEMICONDUCTOR GAS SENSORS; SENSOR RESPONSE; SILICON MEMBRANES; SNO2;

GASES;

EID: 84979518899     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICM.2000.916468     Document Type: Conference Paper

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