Modeling optical microscope images of integrated-circuit structures

Journal of the Optical Society of America A: Optics and Image Science, and Vision

Volumn 8, Issue 5, 1991, Pages 778-790

  Yuan, Chi Min ^a,b   Strojwas, Andrzej J ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

^b IBM   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84975664160     PISSN: 10847529     EISSN: 15208532     Source Type: Journal    
DOI: 10.1364/JOSAA.8.000778     Document Type: Article

References (17)

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