Photofabrication of one-dimensional rough surfaces for light-scattering experiments

Applied Optics

Volumn 30, Issue 28, 1991, Pages 4103-4112

  Mendez E R ^a   Ponce, M A ^a   Ruiz Cortes V ^a   Gu, Zu Han ^b  

^a CENTRO DE INVESTIGACIÓN CIENTÍFICA Y DE EDUCACIÓN SUPERIOR DE ENSENADA   (Mexico)

^b SURFACE OPTICS CORPORATION   (United States)

Author keywords

Light scattering; Optical lithography

Indexed keywords

EID: 84975659884     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.30.004103     Document Type: Article

References (34)

1. E. R. Méndez and K. A. O’Donnell, “Observation of depolarization and backscattering enhancement in light scattering from Gaussian rough surfaces,” Opt. Commun. 61, 91-95 (1987).
2. K. A. O’Donnell and E. R. Méndez, “Experimental study of scattering from characterized random surfaces,” J. Opt. Soc. Am. A 4, 1194-1205 (1987).
3. M. J. Kim, J. C. Dainty, A. T. Friberg, and A. J. Sant, “Experimental study of enhanced bakscattering from one- and two-dimensional random rough surfaces,” J. Opt. Soc. Am. A 7, 569-577 (1990).
4. A. R. McGurn, A. A. Maradudin, and V. Celli, “Localization effects in the scattering of light from a randomly rough grating,” Phys. Rev. B 31, 4866-4871 (1985).
5. V. Celli, A. A. Maradudin, A. M. Marvin, and A. R. McGurn, “Some aspects of light scattering from a randomly rough metal surface,” J. Opt. Soc. Am. A 2, 2225-2239 (1985).
6. A. R. McGurn and A. A. Maradudin, “Localization effects in the elastic scattering of light from a randomly rough surface,” J. Opt. Soc. Am. B 4, 910-926 (1987).
7. Z. H. Gu, R. S. Dummer, A. A. Maradudin, and A. R. McGurn, “Experimental study of the opposition effect in the scattering of light from a randomly rough metal surface,” Appl. Opt. 28, 537-543 (1989).
8. P. Tran and V. Celli, “Monte Carlo calculation of backscattering enhancement for a randomly rough grating,” J. Opt. Soc. Am. A 5, 1635-1637 (1988).
9. M. Nieto-Vesperinas and J. M. Soto-Crespo, “Monte Carlo simulations for scattering of electromagnetic waves from perfectly conductive random rough surfaces,” Opt. Lett. 12, 979-981 (1987).
10. A. A. Maradudin, E. R. Méndez, and T. Michel, “Backscattering effects in the elastic scattering of p-polarized light from a large-amplitude random metallic grating,” Opt. Lett. 14, 151-153 (1989).
11. J. M. Soto-Crespo and M. Nieto-Vesperinas, “Electromagnetic scattering from very rough random surfaces and deep reflection gratings.” J. Opt. Soc. Am. A 6, 367-384 (1989).
12. M. Nieto-Vesperinas and J. M. Soto-Crespo, “Light diffracted intensities from very deep gratings,” Phys. Rev. B 38, 7250-7259 (1988).
13. M. Nieto-Vesperinas and J. M. Soto-Crespo, “Connection between blazes from gratings and enhancements from random rough surfaces,” Phys. Rev. B 39, 8193-8197 (1989).
14. E. R. Méndez, M. A. Ponce, V. Ruiz-Cortés, and Z. H. Gu, “Coherent effects in the scattering of light from random surfaces with symmetries,” Opt. Lett. 16, 123-125 (1991).
15. E. R. Méndez, M. A. Ponce, and V. Ruiz, “Light scattering from one-dimensional surfaces with an even profile,” in Stray Radiation in Optical Systems, R. P. Breault, ed., Proc. Soc. Photo-Opt. Instrum. Eng. 1331, 18-29 (1990).
16. A. R. McGurn and A. A. Maradudin, “An analogue of enhanced backscattering in the transmission of light through a thin film with a randomly rough surface,” Opt. Commun. 72, 279-285 (1989).
17. P. Beckmann, “Scattering by non-Gaussian surfaces,” IEEE Trans. Antennas Propag. AP-21, 169-175 (1973).
18. E. Jakeman and B. J. Hoenders, “Scattering by a random surface of rectangular grooves,” Opt. Acta 29, 1587-1598 (1982).
19. G. S. Brown, “Scattering from a class of randomly rough surfaces,” Radio Sci. 17, 1274-1280 (1980).
20. M. J. Kim, E. R. Méndez, and K. A. O’Donnell, “Scattering from gamma-distributed surfaces,” J. Mod. Opt. 34, 1107-1119(1987).
21. S. C. Wu, M. S. Chen, and A. K. Fung, “Non-Gaussian surface generation,” IEEE Trans. Geosci. Remote Sensing 26, 885-888 (1988).
22. S. C. Wu, M. S. Chen, and A. K. Fung, “Scattering from non-Gaussian randomly rough surfaces—cylindrical case,” IEEE Trans. Geosci. Remote Sensing 26, 790-798 (1988).
23. T. Michel, A. A. Maradudin, and E. R. Méndez, “Enhanced backscattering of light from a non-Gaussian random metal surface,” J. Opt. Soc. Am. B 6, 2438-2446 (1989).
24. E. Jakeman and J. W. McWhirter, “Correlation function dependence of the scintillation behind a deep random phase screen,” J. Phys. A. 10, 1599-1643 (1977).
25. M. V. Berry, “Diffractals,” J. Phys. A. 12, 781-797 (1979).
26. E. Jakeman, “Fraunhofer scattering by a subfractal diffuser,” Opt. Acta 30, 1207-1212 (1983).
27. D. L. Jordan, R. C. Hollins, and E. Jakeman, “Experimental measurements of non-Gaussian scattering by a fractal diffuser,” Appl. Phys. B 31, 179-186 (1983).
28. D. L. Jordan, R: C. Hollins, and E. Jakeman, “Infrared scattering by a fractal diffuser,” Opt. Commun. 49, 1-5 (1984).
29. E. Jakeman and J. H. Jefferson, “Scintillation in the Fresnel region behind a sub-fractal diffuser,” Opt. Acta 31, 853-865 (1984).
30. D. L. Jaggard and X. Sun, “Scattering from fractally corrugated surfaces,” J. Opt. Soc. Am. A 7, 1131-1138 (1990).
31. P. F. Gray, “A method of forming optical diffusers of simple known statistical properties,” Opt. Acta 25, 765-775 (1978).
32. W. T. Welford, “Star tests,” in Optical Shop Testing, D. Malacara, ed. (Wiley, New York, 1978).
33. J. W. Goodman, “Statistical properties of speckle patterns,” in Laser Speckle and Related Phenomena, J. C. Dainty, ed. (Springer-Verlag, Berlin, 1984), p. 21.
34. J. W. Goodman, Introduction to Fourier Optics (McGraw-Hill, San Francisco, Calif., 1968), p. 13.