Calibration of numerical aperture effects in interferometric microscope objectives

Applied Optics

Volumn 28, Issue 16, 1989, Pages 3333-3338

  Creath, Katherine ^a  

^a WYKO Corporation   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84975582394     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.28.003333     Document Type: Article

References (10)

1. F. R. Tolmon and J. G. Wood, "Fringe Spacing in Interference Microscopes," J. Sci. Instrum. 33, 236-238 (1956).
2. G. Schulz, "Uber Interferenzen Gleicher Dicke und Lngenmessung mit Lichtwellen," Ann. Phys. 14, 177-187 (1954).
3. J. W. Gates, "Fringe Spacing in Interference Microscopes," J. Sci. Instrum. 33, 507-507 (1956).
4. C. F. Bruce and B. S. Thornton, "Obliquity Effects in Interference Microscopes," J. Sci. Instrum. 34, 203-204 (1957).
5. E. Ingelstam, "Problems Related to the Accurate Interpretation of Microinterferograms," in Interferometry, National Physical Laboratory Symposium No. 11 (Her Majesty's Stationery Office, London, 1960), pp. 141-163.
6. H. Mykura and G. E. Rhead, "Errors in Surface Topography Measurements with High Aperture Interference Microscopies," J. Sci. Instrum. 40, 313-315 (1963).
7. M. B. Dowell, C. A. Hultman, and G. M. Rosenblatt, "Determination of Slopes of Microscopic Surface Features by Nomarski Polarization Interferometry," Rev. Sci. Instrum. 48, 1491-1497 (1977).
8. Standards manufactured by VLSI Standards, Inc., 2660 Marine Way, Mountain Valley, CA 94043.
9. J. R. Benford, "Microscope Objectives," in Applied Optics and Optical Engineering, Vol. 3, R. Kingslake, Ed. (Academic, New York, 1966), pp. 145-182.
10. J. C. Wyant, C. L. Koliopoulos, B. Bhushan, and D. Basila, "Development of a Three-dimensional Noncontact Digital Optical Profiler," Trans. ASME J. Tribology 108, 1-8 (1986).