A Scanning Electron Microscope Investigation of Glass Flow in MOS Integrated Circuit Fabrication

Journal of the Electrochemical Society

Volumn 121, Issue 2, 1974, Pages 307-310

  Armstrong, W E ^a   Tolliver, D L ^a  

^a MOTOROLA INC   (United States)

Author keywords

flow; glass; MOS integrated circuit

Indexed keywords

EID: 84975428852     PISSN: 00134651     EISSN: 19457111     Source Type: Journal    
DOI: 10.1149/1.2401803     Document Type: Article

References (6)

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