Titanium nitride PVD coating technology

Surface Engineering

Volumn 1, Issue 2, 1985, Pages 93-104

  Matthews, Allan ^a  

^a UNIVERSITY OF HULL   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84974989086     PISSN: 02670844     EISSN: 17432944     Source Type: Journal    
DOI: 10.1179/sur.1985.1.2.93     Document Type: Article

References (56)

1. D. Mattox: Elecirochem. Tecltnol., 1964, 2. 295.
2. R. F. Bunshah and A. C. Ragwjram: J. Vac. Set. Technol., 1972. 9. 1385.
3. R. F. Bunshah: Thin Solid Films, 1981.80, 255.
4. M. Koboyashi and Y. Doi: Thin Solid Films, 1978, 54, 17.
5. A. Matthews and D. G. Teer: Thin Solid Films, 1980, 72, 541.
6. A. Matthews and D. G. Teer: Thin Solid Films, 1981. 80. 41.
7. H. Moll and H. Daxinger: Us Patent 4 197 175, 1980.
8. J. Vogel And S. Scherrer: Information Folder No. 5004, Oerlikon-Buhrle Holdings Ltd, Zurich, Switzerland, June 1982.
9. R. Buhl, H. K. Pulker, and E. Moll: Thin Solid Films, 1981, 80, 265.
10. R. Hatschek: Am. Mach., Special Report 752, March 1983.
11. G. A. Baum: Dow Chemical Co. Report, Rfp-686 Uc-25, Golden, Col., 1967.
12. Sales Literature, Tecvac Ltd, 1984.
13. M. E. Boston: Metallurgia, June 1983, 248.
14. J. R. Morley And H. R. Smith: J. Vac. Sci. Technol., 1972, 9, 1377.
15. S. Komiya AndK. Tsuruska: J. Vac. Sci. Technol., 1976, 13, 520.
16. W. Langendorfer: Manuf. Eng., May 1982, 59.
17. Am. Mach., March 1982, 71.
18. Sales Literature, Ulvac, September 1982.
19. L. P. Sablev: Us Patent 3 793 179, 1974.
20. A. A. Snaper: Us Patent 3 625 848, 1971.
21. H. Wroe: Uk Patent 2972695, 1961.
22. D. A. Rutherford: Des. Eng., June 1984, 35.
23. R. G. Duckworth: Thin Solid Films, 1980, 73, 275.
24. R. G. Duckworth: In Int. Conf. On Thin and Thick Film Technology, Augsburg, 1977, Ntg 60 Vde; 1977, Berlin, Verein Deutscher Eisenhiittenleute.
25. Dowty Technical Leaflet, Icmc 84, 1984.
26. Metall. Mater. Technol., 1980, 16, 437.
27. R. A. Dugdale: Thin Solid Films, 1977, 45, 541.
28. J. P. Coad and R. A. Dugdale: Wire Ind., 1977, 44, 771.
29. R. B. Newberry, A. G. Doggett, and M. H. Jacobs: In Proc. 1st Conf. On Materials Engineering, (Ed. A. N. Bramley); 1984, London, Institution Of Metallurgists.
30. W. D. Munz, D. Hofmann, and K. Hartig: Thin Solid Films, 1982, 96, 79.
31. A. Matthews and A. R. Lefkow: Proc. Ictf-6, Stockholm, August 1984: To Be Published In Thin Solid Films.
32. A. M. Dorodnov: Sov. Phys. Tech. Phys., 1978, 23, 1058.
33. C. T. Wan, D. L. Chambers, and D. C. Carmichael: J. Vac. Sd. Technol., 1971, 8, 99.
34. J. A. Thornton: Ann. Rev. Mater. Sci., 1977, 7, 239.
35. A. Matthews and H.A. Sundquist: In Proc. Int. Ion Engineering Congress, Isiat 83; 1983, Kyoto, Institute Of Electrical Engineers (Japan).
36. J. E. Daalder: J. Phys. D: Appl. Phys., 1976, 9, 2379.
37. J. E. Daalder: Physica, 1981, 104c, 91.
38. V. M. Lunev, V. D. Ovcharenko, and V. M. Khoroshikh: Sov. Phys. Tech. Phys., 1977, 22, 855.
39. R. L. Boxman and S. Goldsmith: J. Appl. Phys., 1981, 52, 151.
40. A. Matthews and D. T. Gethin: Thin Solid Films, 1984, 117, 261.
41. A. Matthews: Vacuum Taip, 1982, 32, 311.
42. A. Matthews: In Proc. Ton Assisted Treatments, Techniques And Processes’; 1982, London, The Metals Society.
43. U. Helmersson, B. O. Johnsson, J.-E. Sundgren, H. T. G. Hentzell, and P. Billgren: To Be Published In J. Vac. Sci. Technol.
44. D. Mattox: In Proc. Ictf-6, Stockholm, August 1984, To Be Published In Thin Solid Films.
45. M. K. Hibbs, B. O. Johansson, J.-E. Sundgren, and U. Helmersson: In Proc. Icmc’84; To Be Published In Thin Solid Films.
46. A. Matthews and D. G. Teer: Thin Solid Films, 1980, 73, 315.
47. H. A. Sundquist, E. H. Sirvio, And M. Sulonen: Thin Solid Films, 1982, 96, 93.
48. W. D. Sproul: In Proc. Int. Conf. On Thin Films, Ictf6; To Be Published In Thin Solid Films.
49. Technical Literature, Kloster Speedsteel/Fagersta, 1984.
50. J. E. Sundgren: In Proc. Ictf-6, Stockholm, August 1984; To Be Published In Thin Solid Films.
51. A. Matthews: In Proc. 1st Conf. On Materials Engineering, (Ed. A. N. Bramley); 1984, London, Institution Of Metallurgists.
52. T. Tsukamoto, K. Sasaki, K. Shibuki, H. Momma, and T. Sokichi: In Proc. Conf. On Advances In Hardmetal Production, 1983, Luzern, Switzerland; Shrewsbury, Metal Powder Report Publishing Services.
53. H. A. Sundquist, E. H. Sirvio, and M. T. Kurkinen: Met. Technol., 1983, 10, 130.
54. K. Z. Gordashnik, V. I. Gorokhovsky, and B. A. Uryukov: In Proc. Int. Ion Engineering Congress, Isiat’ 83; 1983, Kyoto, Institute Of Electrical Engineers (Japan).
55. P. Helevirta and P. Kettunen: In Proc. Int. Conf. On Metallurgical Coatings, Icmc’ 84, San Diego, Usa; To Be Published In Thin Solid Films.
56. S. Komiya, N. Umezu, and C. Hayashi: In Proc. 6th Int. Conf. On Special Melting AndMetallurgical Coatings; 1974, San Diego, Usa.