Copper-Based Metallization in ULSI Structures

MRS Bulletin

Volumn 19, Issue 8, 1994, Pages 15-21

  Li, Jian ^a   Seidel, Tom E ^a   Mayer, Jim W ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84972029133     PISSN: 08837694     EISSN: 19381425     Source Type: Journal    
DOI: 10.1557/S0883769400047692     Document Type: Article

References (19)

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