A flexible and wearable generator with fluorocarbon plasma induced wrinkle structure

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn 2016-February, Issue , 2016, Pages 1181-1184

  Cheng, Xiaoliang ^a   Chen, Xuexian ^a   Meng, Bo ^a   Han, Mengdi ^a   Shi, Mayue ^a   Chen, Haotian ^a   Song, Yu ^a   Zhang, Haixia ^a  

^a PEKING UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

MECHANICS; MEMS; SILICONES;

ALTERNATING CURRENT; ENERGY HARVESTER; FLUOROCARBON PLASMA; FRICTION LAYERS; MANUFACTURING PROCESS; MATERIAL MODIFICATIONS; MECHANICAL ENERGIES; MOTION ENERGY;

WEARABLE TECHNOLOGY;

EID: 84970998466     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2016.7421847     Document Type: Conference Paper

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