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Volumn 10315, Issue , 2005, Pages 139-141
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Phase retrieval as an optical metrology tool; Technical Digest
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Author keywords
aspheric testing; optical metrology; Phase retrieval
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Indexed keywords
ASPHERICS;
UNITS OF MEASUREMENT;
WAVEFRONTS;
ASPHERIC TESTING;
DETECTOR ARRAYS;
EXPERIMENTAL APPARATUS;
FOCUS INTENSITY;
OPTICAL METROLOGY;
OPTICAL METROLOGY TOOLS;
OPTICAL SURFACES;
PHASE RETRIEVAL;
OPTICAL SYSTEMS;
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EID: 84970900102
PISSN: 0277786X
EISSN: 1996756X
Source Type: Conference Proceeding
DOI: 10.1117/12.605914 Document Type: Conference Paper |
Times cited : (17)
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References (4)
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