Filling of Micron-Sized Contact Holes with Copper by Energetic Cluster Impact

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 12, Issue 5, 1994, Pages 2925-2930

  Haberland, Hellmut ^a   Mall, Martin ^a   Moseler, Michael ^a   Qiang, You ^a   Reiners, Thomas ^a   Thurner, Yonca ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84967882486     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.578967     Document Type: Letter

References (15)

1. S.M.Rossnagel, D.Mikalsen, H.Kinoshita, and J.J.Cuomo, J.Vac.Sci.Technol.A 9, 261 (1991), and references therein.
2. B. Chapman, Glow Discharge Processes (Wiley, New York, 1982).
3. V. Comello, Semicond.Int.March, 67 (1991).
4. W. M. Holber, J. S. Logan, H. J. Grabarz, J. T. C. Yeh, J. B. O. Caugh-man, A. Sugarman, and F. E. Turene, J.Vac Sci.Technol.A 11, 2903 (1993), and references therein.
5. H. Haberland, M. Karrais, M. Mall, and Y. Thumer, J.Vac.Sci.Technol.A 10, 3266 (1992).
6. H. Haberland, Z. Insepov, and M. Moseler, Z.Phys.D 26, 229 (1993), and to be published.
7. R. L. McEachera, W. L. Brown, M. F. Jarrold, M.Sosnowski, G. Takaoka, H. Usui, and I. Yamada, J.Vac.Sci.Technol.A 9, 3105 (1991), and references therein.
8. C. F. Hagena, Rev.Sci.Instrum.63, 2374 (1992).
9. H. Haberland, M. Mall, M. Moseler, Y. Qiang, Th. Reiners, and Y. Thurner (unpublished).
10. The operational principles of gas aggregation sources and the high voltage post acceleration detector is described in detail, in, Clusters of Atoms and Molecules I, edited by H.Haberland (Springer, Berlin, 1994), Chap.3.
11. S. G. Choi and M. Kushner, Mater.Res.Soc.Symp.Proc.206, 283 (1991).
12. C. Granqvist and R. Buhrmann, J.Appl.Phys.47, 2200 (1976).
13. Th. Reiners, W. Orlik, Ch. Ellert, M. Schmidt, and H. Haberland, Chem.Phys.Lett.215, 357 (1993).
14. H. S. Rupprecht (private communication).
15. H. Niederwald (private communication).