Low-Knudsen-number transport and deposition xGexlayers on Si substrates by rapid thermal chemical vapor deposition

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 12, Issue 4, 1994, Pages 1020-1026

  Liao, Hung ^a   Cale, Timothy S ^a  

^a ARIZONA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84967851748     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.579278     Document Type: Conference Paper

References (30)

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