Two-dimensional self-consistent fluid simulation of radio frequency inductive sources

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 12, Issue 4, 1994, Pages 1387-1396

  DiPeso, G ^a   Vahedi, V ^a   Hewett, D W ^a   Rognlien, T D ^a  

^a LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84967831683     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.579326     Document Type: Conference Paper

References (24)

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