T-shape gate process & its application in HFET fabrication

2001 6th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2001 - Proceedings

Volumn 2, Issue , 2001, Pages 1334-1336

  Zheng, Yingkui ^a   He, Zhijing ^a   Wu, Dexin ^a  

^a INSTITUTE OF GEOLOGY AND GEOPHYSICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84964474569     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSICT.2001.982148     Document Type: Conference Paper

References (2)

1. DIMITRIS PAVLIDIS .The University of Michigan.COMPOUND SEMICONDUCTOR, June 1999,p.58
2. R.Lee Ross, Stefan P. Svensson and Paolo Lugli Pseudomorphic HEMT Technology and Applications, 1996.p.96