MEMS devices for flow control

28th Fluid Dynamics Conference

Volumn , Issue , 1997, Pages

  Tai, Yu Chong ^a   Ho, Chih Ming ^b  

^a California Institute of Technology   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; FLUID DYNAMICS; MAGNETIC MOMENTS; NICKEL ALLOYS; NITRIDES; SHEAR STRESS; SILICON NITRIDE;

CONSTANT TEMPERATURE; ELECTRICAL COIL; EXTERNAL MAGNETIC FIELD; OUT-OF-PLANE MOTION; POLYSILICON RESISTORS; ROTATIONAL ANGLE; SURFACE SHEAR STRESS; VACUUM CAVITY;

MAGNETIC ACTUATORS;

EID: 84964206633     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

1. Ho, C.M. and Huang, L.S., "Sub-harmonics and Vortex Merging in Mixing Layers", Journal of Fluid Mechanics, Vol. 119, pp. 443-473, 1982.
2. Ho, C.M. and Huerre, P., "Perturbed Free Shear Layers," Ann. Rev. of Fluid Mech., Vol. 16, pp. 365- 424, 1984.
3. Liu, C., Tai, Y.C. Huang, J. and Ho, C. M., "Surface-Micromachined Thermal Shear Stress Sensor," Application of Microfabrication to Fluid Mechanics, FED-Vol. 197, pp. 9-16, ASME, 1994.
4. Huang, J., Tung, S., Ho, C. M., Liu, C., and Tai, Y. C., "Improved Micro Thermal Shear-Stress Sensor", IEEE transactions on Instrumentation and Measurement, Vol. 45, No. 2, April. 1996.
5. Jiang, F., Tai, Y. C., Gupta, B., Goodman, R., Tung, S., Huang, J., and Ho, C. M., "A Surface- Micromachined Shear Stress Imager", Proceedings, the 9th International IEEE MEMS Meeting, pi 10-115, San Diego, USA. 1996.
6. Liu, C., Tsao, T., Tai, Y.C., Leu, J., Ho, C.M., Tang, W.L. and Miu, D., "Out-Of-Plane Permanent Magnetic Actuators for delta Wing Control," Proceedings, IEEE Micro Electro Mechanical Systems Workshop, pp. 7-12, the Netherlands, Jan. 29, 1995.
7. Liu, C., Tsao, T., Tai, Y.C., Liu, W., Will P. and Ho, C.M., "A Micromachined Permalloy Magnetic Actuator Array for Micro Robotics Assembly Systems," Technical Digest, Transducers'95, pp. 328-331, 1995.
8. Miller R., Burr, G., Tai, Y.C., Psaltis, D., Ho, C.M. and Katti, R, "Electromagnetic MEMS Scanning Mirrors for Holographic Data Storage," Technical Digest, Solid-State Sensor and Actuator Workshop, Hilton Head Island, South Carolina, USA, 1996.