High Q resonating cantilevers for in situ measurements of ferromagnetic films

2001 Microelectromechanical Systems Conference, MEMS 2001

Volumn , Issue , 2002, Pages 36-39

  Moreland, J ^a   Hubbard, T J ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRITICAL CURRENTS; ELECTROMECHANICAL DEVICES; FERROMAGNETIC MATERIALS; FERROMAGNETISM; MAGNETIC MOMENTS; MAGNETISM; MEMS; MICROMECHANICS; NATURAL FREQUENCIES; THIN FILMS; TORQUE;

DYNAMIC FEEDBACK; FERROMAGNETIC FILMS; IN-SITU MEASUREMENT; MAGNETIC TORQUES; MECHANICAL FORCE; MICRO-CANTILEVERS; TEMPERATURE-DEPENDENT ELASTIC MODULUS; ULTRA-THIN FERROMAGNETIC FILMS;

NANOCANTILEVERS;

EID: 84963864716     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSC.2001.992737     Document Type: Conference Paper

References (5)

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3. D. Rugar, H.-J. Mamin, and P. Guenther, "Improved fiber-optic interferometer for atomic force microscopy," Appl. Phys. Lett. 55, pp. 2588-90, 1989.
4. J. Mertz, O. Marti, and J. Mlynek, "Regulation of a microcantilever response for force feedback," Appl. Phys. Lett.. 62, pp. 2344-2346, 1993.
5. T. Bayer, J. Greshchner, G. Kraus, H. Weisss, and O. Walter, "Method for Producing Micromechanical Sensors," U. S. Patent 5,051,379, September 24, 1991.