A MEMS device for measurement of skin friction with capacitive sensing

2001 Microelectromechanical Systems Conference, MEMS 2001

Volumn , Issue , 2002, Pages 4-7

  Zhe, Jiang ^a   Farmer, K R ^b   Modi, V ^a  

^a Columbia University ^*  (United States)

^b NEW JERSEY INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMECHANICAL DEVICES; MEMS; MICROMECHANICS; SHEAR STRESS; SILICON WAFERS; SOFTWARE TESTING;

CAPACITIVE SENSING; DESIGN OBJECTIVES; DIFFERENTIAL CAPACITANCE; FLOATING ELEMENT SENSOR; SPATIAL RESOLUTION; THEORETICAL SIMULATION; ULTRATHIN SILICON; WALL SHEAR STRESS;

WAFER BONDING;

EID: 84963812944     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSC.2001.992728     Document Type: Conference Paper

References (10)

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