Closed-loop fuzzy control of torsional micromirror with multiple electrostatic electrodes

2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest

Volumn , Issue , 2002, Pages 85-86

  Chiou, J C ^a   Lin, Y C ^a   Wu, S D ^b  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^b National Science Council   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATICS; FUZZY CONTROL; MIRRORS; MOEMS;

CONTROL TECHNOLOGIES; MICRO-MIRROR DEVICES; MULTIPLE ELECTRODES; NONLINEAR TRANSFER; OPERATING FREQUENCY; SINGLE ELECTRODES; TORSIONAL MICROMIRRORS; TRANSIENT BEHAVIOR;

ELECTRODES;

EID: 84963785025     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OMEMS.2002.1031455     Document Type: Conference Paper

References (3)

1. J. C. Chiou and Y. C. Lin, "A Novel Control Design of Stepping Micromirror Using Multiple Electrostatic Driving Electrodes," IEEE/LEOS Optical MEMS 2001, Okinawa, 25-28 September 2001, Japan
2. David A. Koester et al, MUMPs Design Handbook Revision 7.0, Cronos Website, http://www.memsrus.com/.
3. Adisom Tuantranont et al, "MEMS-Controllable Microlens Array for Beam Steering and Precision Alignment in Optical Interconnect Systems," Proceedings of the 2000 Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, pp. 101-104, June 4-8, 2000.