Measurement of noise characteristics of MEMS accelerometers

2001 International Semiconductor Device Research Symposium, ISDRS 2001 - Proceedings

Volumn , Issue , 2001, Pages 190-193

  Mohd Yasin, F ^a   Korman, C E ^a   Nagel, D J ^a  

^a George Washington University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMECHANICAL DEVICES; MEMS; MICROELECTROMECHANICAL DEVICES; SEMICONDUCTOR DEVICES;

ANALOG DEVICES; EARTHQUAKE DETECTION; G-CONDITION; MEASUREMENT TECHNIQUES; MEMS ACCELEROMETER; MICRO ELECTROMECHANICAL SYSTEM (MEMS); NOISE CHARACTERISTIC; ORTHOGONAL DIRECTIONS;

ACCELEROMETERS;

EID: 84961839086     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ISDRS.2001.984472     Document Type: Conference Paper

References (6)

1. Nagel, D.J.; Zaghloul, M.E., IEEE Circuits and Devices Magazine, Volume: 17 Issue: 2, March 2001 Page(s): 14-25
2. ADXL202 Datasheet, Analog Devices Inc, 1999.
3. ADXL105 Datasheet, Analog Devices Inc, 1999.
4. ADXL190 Datasheet, Analog Devices Inc, 1999.
5. Chang, J; Abidi A.A; Viswanathan C.R., IEEE Transactions on Electron Devices, Volume 41, No. 11, November 1994 Page(s): 1965-1971.
6. Hung, K.K; Ko P.K; Hu C.; Cheng, Y.C, IEEE Transactions on Electron Devices, Volume 37, No. 3, March 1990 Page(s): 654-665.