Ion implant data log analysis for process control and fault detection

Proceedings of the International Conference on Ion Implantation Technology

Volumn 22-27-September-2002, Issue , 2002, Pages 331-334

  Rendon, Michael J ^a   Sing, David C ^a   Beard, Marcy ^a   Hartig, Michael ^a   Arnold, John C ^a  

^a MOTOROLA INC   (United States)

Author keywords

Automatic Process Control; Charge Control; Ion Implantation; Mass Analysis

Indexed keywords

DATA MINING; FAULT DETECTION; INFORMATION RETRIEVAL; ION IMPLANTATION; IONS; MAGNETS; PRINCIPAL COMPONENT ANALYSIS; SEMICONDUCTOR DEVICE MANUFACTURE; SIGNAL DETECTION; STATISTICAL PROCESS CONTROL;

AUTOMATIC PROCESS CONTROL; CHARGE CONTROL; COMPUTER NETWORKING; FUNCTIONAL RELATIONSHIP; MASS ANALYSIS; PRINCIPLE COMPONENT ANALYSIS; SEMICONDUCTOR INDUSTRY; STATISTICAL SIGNIFICANCE;

PROCESS CONTROL;

EID: 84961358960     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IIT.2002.1258007     Document Type: Conference Paper

References (1)

1. M. Rendon, D. C. Sing, "Local Area Network LAN Address Manufacturing and Development Implant Tool Issues," International Ion Implant Technology Conference 2002, unpublished.