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Volumn 660, Issue 1, 2015, Pages
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Piezoelectric MEMS for energy harvesting
a
a
KOBE UNIVERSITY
(Japan)
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Author keywords
[No Author keywords available]
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Indexed keywords
DEPOSITION;
ENERGY CONVERSION;
ENERGY HARVESTING;
INK JET PRINTERS;
NANOTECHNOLOGY;
PIEZOELECTRICITY;
PRINTING PRESSES;
STAINLESS STEEL;
FUTURE APPLICATIONS;
GYRO SENSORS;
LEAD-FREE;
MICRODEVICES;
PIEZOELECTRIC ENERGY HARVESTERS;
PIEZOELECTRIC ENERGY HARVESTING;
PIEZOELECTRIC MEMS;
PIEZOELECTRIC PZT THIN FILMS;
THIN FILMS;
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EID: 84960171754
PISSN: 17426588
EISSN: 17426596
Source Type: Conference Proceeding
DOI: 10.1088/1742-6596/660/1/012001 Document Type: Conference Paper |
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Times cited : (35)
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References (3)
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