High-Q Tunable Waveguide Filters Using Ohmic RF MEMS Switches

IEEE Transactions on Microwave Theory and Techniques

Volumn 63, Issue 10, 2015, Pages 3381-3390

  Pelliccia, Luca ^a   Cacciamani, Fabrizio ^a   Farinelli, Paola ^a   Sorrentino, Roberto ^b  

^a RF Microtech   (Italy)

^b UNIVERSITY OF PERUGIA   (Italy)

Author keywords

Bandpass filter; high Q; radio frequency microelectromechanical systems (RF MEMS); tunable filter; Waveguide technology

Indexed keywords

BALLOONS; CIRCULAR WAVEGUIDES; ELECTRIC SWITCHES; ELECTROMECHANICAL DEVICES; MEMS; MICROELECTROMECHANICAL DEVICES; WAVEGUIDES;

ELECTRICALLY TUNABLE; FREQUENCY TUNABILITY; HIGH-FREQUENCY STRUCTURE SIMULATORS; MANUFACTURING COMPLEXITY; RADIO FREQUENCY MICROELECTROMECHANICAL SYSTEMS; RECONFIGURABLE FILTERS; TUNABLE WAVE-GUIDES; WAVEGUIDE TECHNOLOGY;

WAVEGUIDE FILTERS;

EID: 84960106491     PISSN: 00189480     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMTT.2015.2459689     Document Type: Article

References (40)

1. E. Fourn, A. Pothier, C. Champeaux, P. Tristant, A. Catherinot, P. Blondy, G. Tanne, E. Rius, C. Person, F. Huret, "MEMS switchable interdigital coplanar filter," IEEE Trans. Microw. Theory Techn., vol. 51, no. 1, pp. 320-324, Jan. 2003.
2. A. Abbaspour-Tamijani, L. Dussopt, G. M. Rebeiz, "Miniature and tunable filters using MEMS capacitors," IEEE Trans. Microwave Theory Tech., vol. 51, no. 7, pp. 1878-1885, Jul. 2003.
3. A. Ocera, P. Farinelli, P. Mezzanotte, R. Sorrentino, B. Margesin, F. Giacomozzi, "A novel MEMS-tunable hairpin line filter on silicon substrate," in Proc. 36th Eur. Microw. Conf., Sep. 10-15, 2006, pp. 803-806.
4. P. Blondy, C. Palego, M. Houssini, A. Pothier, A. Crunteanu, "RF-MEMS reconfigurable filters on low loss substrates for flexible front ends," in Proc. Asia-Pacific Microw. Conf., Dec. 11-14, 2007, pp. 1-3.
5. G. Monti, L. Tarricone, L. Corchia, "MEMS-based filter with a reconfigurable band-pass," in Proc. 3rd Eur. Conf. Antennas and Propagation, Mar. 23-27, 2009, pp. 445-448.
6. M. F. Karim, A.-Q. Liu, A. Alphones, A. Yu, "A reconfigurable micromachined switching filter using periodic structures," IEEE Trans. Microw. Theory Techn., vol. 55, no. 6, pp. 1154-1162, Jun. 2007.
7. I. C. Hunter and J. D. Rhodes, "Electronically tunable microwave bandpass filters," IEEE Trans. Microw. Theory Techn., vol. MTT-30, no. 9, pp. 1354-1360, Sep. 1982.
8. P. W. Wong and I. C. Hunter, "Electronically tunable filters," IEEE Microwave Mag., vol. 10, no. 6, pp. 46-54, Oct. 2009.
9. W. M. Fathelbab and M. B. Steer, "A reconfigurable bandpass filter for RF/microwave multifunctional systems," IEEE Trans. Microw. Theory Techn., vol. 53, no. 3, pp. 1111-1116, Mar. 2005.
10. P. W. Wong and I. C. Hunter, "A new class of low-loss high-linearity electronically reconfigurable microwave filter," IEEE Trans. Microw. Theory Techn., vol. 56, no. 8, pp. 1945-1953, Aug. 2008.
11. P. W. Wong and I. C. Hunter, "Electronically reconfigurable microwave bandpass filter," IEEE Trans. Microw. Theory Techn., vol. 57, no. 12, pp. 3070-3079, Dec. 2009.
12. S. Courreges, Y. Li, Z. Zhao, K. Choi, A. Hunt, J. Papapolymerou, "Ferroelectric tunable bandpass filters for Ka-band applications," in Proc. 38th Eur. Microw. Conf., Amsterdam, The Netherlands, Oct. 27-31, 2008, pp. 55-58.
13. F. He, X. P. Chen, K. Wu, W. Hong, "Electrically tunable substrate integrated waveguide reflective cavity resonator," in Proc. Asia-Pacific Microw. Conf., Dec. 7-10, 2009, pp. 119-122.
14. S. Sirci, J. D. Martinez, M. Taroncher, V. E. Boria, "Varactorloaded continuously tunable SIW resonator for reconfigurable filter design," in Proc. 41st Eur. Microw. Conf., Oct. 10-13, 2011, pp. 436-439.
15. W. Sichak and H. Augenblicki, "Tunable waveguide filters," in Proc. IRE, Sep. 1951, pp. 1055-1059.
16. B. Yassini, M. Yu, D. Smith, S. Kellett, "A k-band high-Q tunable filter with stable tuning response," IEEE Trans. Microw. Theory Techn., vol. 57, no. 12, pp. 2948-2957, Dec. 2009.
17. A. Djermoun, G. Prigent, N. Raveu, T. Callegari, "A high Q reconfigurable cavity SIW resonator using a novel perturbation method," in Proc. Int. Workshop Microw. Filters, Toulouse, France, Nov. 2009.
18. J. Uher and W. J. R. Hoefer, "Tunable microwave and millimeter-wave band pass filters," IEEE Trans. Microw. Theory Techn., vol. 39, no. 4, pp. 643-653, Apr. 1991.
19. F. Sammoura and L. Lin, "A plastic W-band MEMS tunable filter," in IEEEMTT-S Int. Microw. Symp. Dig., 2006, pp. 136-139.
20. H. Joshi, H. H. Sigmarsson, D. Peroulis, W. J. Chappell, "Highly loaded evanescent cavities for widely tunable high-Q filters," in IEEE/MTT-SInt. Microw. Symp., Jun. 3-8, 2007, pp. 2133-2136.
21. D. W. Winter and R. R. Mansour, "Tunable dielectric resonator bandpass filter with embedded MEMS tuning elements," IEEE Trans. Microw. Theory Techn., vol. 55, no. 1, pp. 154-159, Jan. 2007.
22. R. R. Mansour, "High-Q tunable dielectric resonator filters," IEEE Microw. Mag., vol. 10, no. 6, pp. 84-98, Oct. 2009.
23. P. Farinelli, F. Giacomozzi, G. Mannocchi, R. Marcelli, B. Margesin, P. Mezzanotte, S. Di Nardo, P. Russer, R. Sorrentino, F. Vitulli, L. Vietzorreck, "RF-MEMS SPDT switch on silicon substrate for space application," in Top. Meeting Silicon Monolithic Integr. Circuits in RF Syst. Dig. Papers, Sep. 8-10, 2004, pp. 151-154.
24. S. Kang, H. Cheol Kim, K. Chun, "Single-pole four-throw RF MEMS switch with double stop comb drive," in Proc. IEEE 21st Int. Conf. Micro Electro Mech. Syst., Jan. 13-17, 2008, pp. 1036-1039.
25. S. J. Park, I. Reines, C. Patel, G. Rebeiz, "High-Q RF-MEMS 4-6 GHz tunable evanescent-mode cavity filter," IEEE Trans. Microw. Theory Techn., vol. 58, no. 2, pp. 1145-1148, Feb. 2010.
26. H. Joshi, H. H. Sigmarsson, S. Moon, D. Peroulis, W. J. Chappell, "High-Q fully reconfigurable tunable bandpass filter," IEEE Trans. Microw. Theory Techn., vol. 57, no. 12, pp. 3525-3533, Dec. 2009.
27. J. Xu, X. P. Liang, K. Shamsaifar, "Full wave analysis and design of RF tunable filters," in IEEE MTT-S Int. Microw. Symp. Dig., May 2001, vol. 3, pp. 1449-1452.
28. D. Scarbrough, C. Goldsmith, J. Papapolymerou, Y. Li, "Miniature microwave RF MEMS tunable waveguide filter," in Proc. Eur. Microwave Conf., Oct. 2009, pp. 1860-1863.
29. R. Stefanini, M. Chatras, A. Pothier, J. C. Orlianges, P. Blondy, "High Q tunable cavity using dielectric less RF-MEMS varactors," in Proc. Eur. Microw. Conf., Rome, Italy, Oct. 1, 2009, pp. 1744-1747.
30. R. Stefanini, J. D. Martinez, M. Chatras, A. Porthier, V. Boria, P. Blondy, "13 GHz high-Q tunable surface mounted cavity," in Proc. Int. Workshop Microw. Filters, Toulouse, France, 2009.
31. R. Stefanini, J. D. Martinez, M. Chatras, A. Pothier, V. E. Boria, P. Blondy, "-band high Q tunable surface-mounted cavity resonator using RF MEMS varactors," IEEE Microw. Wireless Compon. Lett., vol. 21, no. 5, May 2011.
32. F. Sammoura and L. Lin, "A plastic W-band MEMS tunable filter," in IEEEMTT-S Int. Microw. Symp. Dig., , 2006, pp. 136-139.
33. H. Joshi, H. H. Sigmarsson, D. Peroulis, W. J. Chappell, "Highly loaded evanescent cavities for widely tunable high-Q filters," in IEEE/MTT-S Int. Microw. Symp., Jun. 3-8, 2007, pp. 2133-2136.
34. D. W. Winter and R. R. Mansour, "Tunable dielectric resonator bandpass filter with embedded MEMS tuning elements," IEEE Trans. Microw. Theory Techn., vol. 55, no. 1, pp. 154-159, Jan. 2007.
35. R. R. Mansour, "High-Q tunable dielectric resonator filters," IEEE Microw. Mag., vol. 10, no. 6, pp. 84-98, Oct. 2009.
36. W. D. Yan and R. R. Mansour, "Micromachined millimeter-wave ridge waveguide filter with embedded MEMS tuning elements," in IEEEMTT-SInt. Microw. Symp. Dig., Jun. 11-16, 2006, pp. 1290-1293.
37. P. Ligander, O. Persson, L. Pelliccia, S. Bastioli, R. Sorrentino, "An Electrically Tunable Waveguide Filter and Waveguide Tuning Devices, International Publication N.: WO 2012/016584 A1; International Application N.: PCT/EP2010/061218, International Filing Date: 2nd August 2010, International Publication," , Feb. 9th, 2012.
38. L. Pelliccia, S. Bastioli, F. Casini, R. Sorrentino, "High-Q MEMSreconfigurable waveguide filters," in Proc. 40th EuMC, Paris, France, Sep.-Oct. 2010, pp. 1126-1129.
39. L. Pelliccia, F. Cacciamani, P. Farinelli, P. Ligander, O. Persson, R. Sorrentino, "High-Q MEMS-tunable waveguide filters in K-band," in Proc. 42nd Eur. Microw. Conf., Amsterdam, The Netherlands, Nov. 2012, pp. 273-276.
40. L. Dussopt and G. M. Rebeiz, "Intermodulation distortion and power handling in RF MEMS switches, varactors, tunable filters," IEEE Trans. Microw. Theory Techn., vol. 51, no. 4, p. 1247, 1256, Apr. 2003.