In-Plane and Out-of-Plane MEMS Gyroscopes Based on Piezoresistive NEMS Detection

Journal of Microelectromechanical Systems

Volumn 24, Issue 6, 2015, Pages 1817-1826

  Dellea, Stefano ^a   Giacci, Federico ^a   Longoni, Antonio Francesco ^a   Langfelder, Giacomo ^a  

^a POLITECNICO DI MILANO   (Italy)

Author keywords

inertial sensors; MEMS gyroscopes; motion amplitude control; NEMS gauges; piezoresistive sensing

Indexed keywords

AMPLITUDE MODULATION; GYROSCOPES;

HIGH OUTPUT SIGNAL; LINEARITY ERRORS; MEMS GYROSCOPE; NOISE PERFORMANCE; OPTIMIZATION CRITERIA; OUT-OF PLANE; PIEZO-RESISTIVE; THERMO-MECHANICAL DAMPING;

WHITE NOISE;

EID: 84959559344     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2015.2441142     Document Type: Article

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