Using natural statistics concept to develop a capacity model that can solve tool-operation multi-to-multi relation of IC FAB

2002 Semiconductor Manufacturing Technology Workshop, SMTW 2002

Volumn , Issue , 2002, Pages 77-80

  Ko, Li Jen ^a   Wang, Ivan ^a  

^a NONE   (Taiwan)

Author keywords

Capacity model; Dispatching; Semiconductor manufacturing; Tool loading

Indexed keywords

SEMICONDUCTOR DEVICE MANUFACTURE;

CAPACITY MANAGEMENT; CAPACITY MODELING; COMMERCIAL MARKET; DISPATCHING; FAB PRODUCTIONS; INNOVATIVE METHODOLOGIES; SEMICONDUCTOR MANUFACTURING; TOOL OPERATIONS;

MANUFACTURE;

EID: 84958185021     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SMTW.2002.1197373     Document Type: Conference Paper

References (1)

1. Mitsugu Kishimoto, Katsutoshi Ozawa, Donald Martin et al., "Optimized Operations by Extended X-Factor Theory Including Unit Hours Concept " The IEEE Transactions on Semiconductor Manufacturing, VOL. 14, NO. 3, August 2001, pp. 187-195.