Ion Beam Induced Chemical Vapor Deposition Procedure for the Preparation of Oxide Thin Films. I. Preparation and Characterization of TiO 2 Thin Films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 12, Issue 5, 1994, Pages 2728-2732

  Leinen, D ^a   Espinos, J P ^a   Fernandez, A ^a   Gonzalez Elipe, A R ^a  

^a UNIVERSITY OF SEVILLE   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84957349911     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.579096     Document Type: Article

References (28)

1. J.J. Cuomo, S.M. Rossnagel, and M.R. Kaufman, Handbook of Ion Beam Processing Technology (Noyes, Park Ridge, 1989).
2. G.K. Wolf, J. Vac. Sci. Technol. A 10, 1757 (1992).
3. G.K. Wolf, Nucl. Instrum. Methods B 65, 107 (1992).
4. S. Pongratz and A. Zoller, J. Vac. Sci. Technol. A 10, 1897 (1992).
5. D.P. Stinton, T.M. Besmann, and R.A. Lowden, Ceram. Bull. 67, 350 (1988).
6. S.R. Kurtz and R.G. Gordon, Solar Energy Mater. 229 (1987).
7. A. G. Zawadzki, C. J. Giunta, and R. G. Gordon, J. Phys. Chem. 96, 5364 (1992).
8. M. Okada and K. Tominaga, J. Appl. Phys. 71, 1955 (1992).
9. D. M. Lind, S. D. Berry, G. Chem, H. Mathias, and L. R. Tertardi, Phys. Rev. B 45, 1838 (1992).
10. A.D. Huelsman and R. Reif, J. Vac. Sci. Technol. A 7, 2554 (1989).
11. M. Ishida, A. Eto, and T. Nakamura, J. Vac. Sci. Technol. A 7, 2931 (1989).
12. T. Tao, W. Wilkinson, and J. Melngailis, J. Vac. Sci. Technol. B 9, 162 (1991).
13. A.D. Dubner and A. Wagner, J. Vac. Sci. Technol. B 7, 1950 (1989).
14. J. Melngailis and P.G. Blanner, Mater. Res. Soc. Symp. Proc. 147, 127 (1989).
15. P.G. Blanner, Y. Butt, J.S. Ro, C.V. Tompson, and J. Melngailis, J. Vac. Sci. Technol. B 7, 1816 (1989).
16. R.L. Kubena, F.P. Stratton, and T.M. Mayer, J. Vac. Sci. Technol. B 6, 1865 (1988).
17. G. Atanassa, R. Thielsch, and D. Popov, Thin Solid Films 223, 288 (1993).
18. Ch. Kuhrt and M. Hassdorff, Surf. Sci. 245, 173 (1991).
19. R. Swanepoel, J. Phys. E 16, 1213 (1983).
20. C.D. Wagner, W.N. Riggs, L.E. Davis, J.F. Moulder, and G. E. Muilenberg, Handbook of X-ray Photoelectron Spectroscopy (Perkin-EImer, Eden Prarie, MN, 1979).
21. A. Fernandez, A. Caballero, and A.R. Gonzalez-Elipe, Surf. Interface Anal. 18, 392 (1992).
22. M.P. Seah and W.A. Dench, Surf. Interface Anal. 1, 2 (1979).
23. D. Leinen, A. Fernandez, J. P. Espinos, T. R. Belderrain, and A. R. Gonzalez-Elipe, Thin Solid Films 241, 198 (1994).
24. H.K. Pulker, Coatings on Glass (Elsevier, Amsterdam, 1984).
25. N.F. Mott and E.A. Davis, Electronic Processes in Non-Crystalline Materials (Clarendon, Oxford, 1979), p. 273.
26. J.P. Espinos, A. Justo, D. Leinen, A. Fernandez, A.R. Gonzalez-Elipe, and A. Caballero (unpublished).
27. D.-S. Chun and C. M. Dai, Phys. Rev. B 45, 11 805 (1992).
28. D. Leinen, A. Fernandez, J.P. Espinos, and A.R. Gonzalez-Elipe, Surf. Interface Anal. 20, 941 (1993).