Electron-sheath interaction in capacitive radio-frequency plasmas

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 10, Issue 4, 1992, Pages 1331-1338

  Vender, D ^a   Boswell, R W ^b  

^a IBM T J WATSON RESEARCH CENTER   (United States)

^b UNIVERSITY OF CANBERRA   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84957342735     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.578248     Document Type: Conference Paper

References (27)

1. V. A. Godyak and R. B. Piejak, Phys. Rev. Lett. 65, 996 (1990).
2. D. N. Ruzic and J. L. Wilson, J. Vac. Sci. Technol. A 8, 3746 (1990).
3. G. Oelerich-Hiil, I. Pukropski, and M. Kujawka, J. Phys. D 24, 593 (1991).
4. G. Dilecce, M. Capitelli, and S. De Benedictis, J. Appl. Phys. 69, 121 (1991).
5. M. A. Lieberman, IEEE Trans. Plasma Sci. 16, 638 (1988).
6. K.-U. Riemann, J. Appl. Phys. 65, 999 (1989).
7. P. M. Vallinga, P. M. Meijer, and F. J. de Hoog, J. Phys. D 22, 1650 (1989).
8. V. A. Godyak, Sov. Phys.-Tech. Phys. 16, 1073 (1972).
9. K.-U. Riemann, J. Phys. D 24, 493 (1991).
10. A. Garscadden and K. G. Emeleus, Proc. Phys. Soc. 79, 535 (1962).
11. K. Kohler, J. W. Coburn, D. E. Horne, E. Kay, and J. H. Keller, J. Appl. Phys. 57, 59 (1985).
12. A. H. Sato and M. A. Lieberman, J. Appl. Phys. 68, 6117 (1990).
13. M. H. Cho, N. Hershkowitz, and T. Intrator, J. Vac. Sci. Technol. A 6, 2978 (1988).
14. O. A. Popov and V. A. Godyak, J. Appl. Phys. 57, 53 (1985).
15. D. Vender, thesis, Australian National University, 1990.
16. B. P. Wood, M. A. Lieberman, and A. J. Lichtenberg, IEEE Trans. Plasma Sci. 19, 619 (1990).
17. C. K. Birdsall and A. B. Langdon, Plasma Physics via Computer Simulation (McGraw-Hill, New York, 1985).
18. D. Vender and R. W. Boswell, IEEE Trans. Plasma Sci. 18, 725 (1990).
19. M. Surendra and D. B. Graves, Phys. Rev. Lett. 66, 1469 (1991).
20. B. P. Wood, M. A. Lieberman, and A. J. Lichtenberg, results presented at IEEE International Conference on Plasma Science, Williamsburg, 1991 (unpublished).
21. R. N. Franklin and W. E. Han, Plasma Phys. Contr. Fusion 30, 771 (1987).
22. V. A. Godyak and S. N. Oks, Sov. Phys.-Tech. Phys. 24, 1255 (1979).
23. C. G. Goedde, A. J. Lichtenberg, and M. A. Lieberman, J. Appl. Phys. 64, 4375 (1988).
24. T. J. Sommerer, W. N. G. Hitchon, R. E. P. Harvey, and J. E. Lawler, Phys. Rev. A 43, 4452 (1991).
25. M. Surendra and D. B. Graves, IEEE Trans. Plasma Sci. 19, 144 (1990).
26. G. R. Misium, A. J. Lichtenberg, and M. A. Lieberman, J. Vac. Sci. Technol. A 7, 1007 (1989).
27. V. A. Godyak and R. B. Piejak, J. Appl. Phys. 68, 3157 (1990).