Trends for future silicon technology

Japanese Journal of Applied Physics

Volumn 33, Issue 12S, 1994, Pages 674-675

  Ohmi, Tadahiro ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Binary multivalued analog merged operation; Four terminal device; Human intelligence system; Low temperature processing; Metal substrate and metal gate SOI CMOS; Ultraclean technology

Indexed keywords

EID: 84957335978     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.33.6747     Document Type: Article

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