Reaction of thin metal films with crystalline and amorphous al2O3

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 4, Issue 6, 1986, Pages 3139-3141

  Zhao, X A ^a   Kolawa, E ^a   Nicolet, M A ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84957283564     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.573642     Document Type: Article

References (8)

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3. X.-A. Zhao, T. C. Banwell, and M.-A. Nicolet, Spieproc. 623 (1986) (to be published).
4. R. Pretonus, Y. M. Harris, and M.-A. Nicolet, Solid-State Electron. 21, 667 (1978).
5. W.-K. Chu, J. W. Mayer, and M.-A. Nicolet, Backscattering Spectrometry(Academic, New York, 1978).
6. A. R. Miedema, P. F. Dechatel, and F. R. De Buer, Physica 100B, 1 (1980).
7. W. L. Johnson, Y.-T. Cheng, M. Van Rossum, and M.-A. Nicolet, Nucl. Instrum. Methods B7(8), 657 (1985).
8. T. Banwell, B. X. Liu, I. Golecki, and M.-A. Nicolet, Nucl. Instrum. Methods 209-210, 125 (1983).