Synthesis of aromatic polyimide film by vacuum deposition polymerization

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 5, Issue 4, 1987, Pages 2253-2256

  Takahashi, Y ^a   lijlma, M ^a   Inagawa, K ^a   Itoh, A ^a  

^a ULVAC INC   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84957278952     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.574429     Document Type: Article

References (4)

1. S. Hayakawa and K. Wasa, Hakumakukagijutsu (Kyohritsushuppan, Tokyo, Japan,1982), p.185.
2. S. B. Delos, R. K. Schellenberg, J. E. Smedley, and D. E. Kranbuehl, J. Appl. Polym. Sci. 27, 4295 (1982).
3. K. lida, S. Nakamura, M. leda, and G. Savva, Trans. IEE Jpn. 103, 111 (1983).
4. M. Ijima, Y. Takahashi, K. Inagawa, and A. Itoh, in Proceedings of the 25 th Vacuum Conference, Japan, 1984 3!Cp-l.