Preparation of cubic boron nitride film by activated reactive evaporation with a gas activation nozzle

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 5, Issue 4, 1987, Pages 2696-2700

  Inagawa, K ^a   Watanabe, K ^a   Ohsone, H ^a   Saitoh, K ^a   Itoh, A ^a  

^a UL VAC Corp ^*  (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84957278646     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.574722     Document Type: Article

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