Amorphous nitrogenated carbon films: Structural modifications induced by thermal annealing

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 12, Issue 6, 1994, Pages 3048-3053

  Canteri, R ^d  

^a PONTIFICAL CATHOLIC UNIVERSITY OF RIO DE JANEIRO   (Brazil)

^b FEDERAL UNIVERSITY OF RIO DE JANEIRO   (Brazil)

^c UNIVERSITY OF TRENTO   (Italy)

^d Divisione Materiali Innovativi ^*  (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84957277995     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.578934     Document Type: Article

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