Particle bombardment effects on thin-film deposition: A review

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 7, Issue 3, 1989, Pages 1105-1114

  Mattox, D M ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84957274631     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.576238     Document Type: Article

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